Sensing and Control of MEMS Accelerometers Using Kalman Filter

Document Type

Conference Proceeding

Publication Date


Publication Title

Control and Decision Conference (CCDC), 2012 24th Chinese


A Kalman filter is designed and implemented for a MEMS capacitive accelerometer in order to filter out two major noise sources in the accelerometer, which are electronic noise and thermal mechanical noise (Brown noise). The dynamic modeling of the MEMS accelerometer is developed. A Kalman filter based force-to-rebalance controller is constructed on the model. Simulation results show that the Kalman filter based controller produces an excellent noise reduction, increases the dynamic range of the accelerometer, and stabilizes the accelerometer system under a closed-loop structure.