Document Type
Article
Publication Date
4-2009
Publication Title
IEEE Transactions on Industrial Electronics
Abstract
This paper presents a novel design methodology and hardware implementation for the drive-mode control of vibrational micro-electro-mechanical systems gyroscopes. Assuming that the sense mode (axis) of the gyroscope is operating under open loop, the drive-mode controller compensates an undesirable mechanical spring-coupling term between the two vibrating modes, attenuates the effect of mechanical-thermal noise, and most importantly, forces the output of the drive mode to oscillate along a desired trajectory. The stability and robustness of the control system are successfully justified through frequency-domain analysis. The tracking error between the real output and the reference signal for the drive mode is proved to be converging with the increase of the bandwidth of the controller. The controller is first simulated and then implemented using field-programmable analog array circuits on a vibrational piezoelectric beam gyroscope. The simulation and experimental results verified the effectiveness of the controller.
Repository Citation
Dong, Lili and Avanesian, David, "Drive-Mode Control for Vibrational MEMS Gyroscopes" (2009). Electrical and Computer Engineering Faculty Publications. 102.
https://engagedscholarship.csuohio.edu/enece_facpub/102
Original Citation
Lili, D., & Avanesian, D. (2009). Drive-mode control for vibrational MEMS gyroscopes. IEEE Transactions on Industrial Electronics, 56, 4, 956-963.
DOI
10.1109/TIE.2008.2010088
Version
Postprint
Publisher's Statement
© 2009 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Volume
56
Issue
4
Included in
Controls and Control Theory Commons, Electronic Devices and Semiconductor Manufacturing Commons