Title
Application of Differential Scanning Calorimetry to Characterize Thin Film Deposition Processes
Date of Award
2010
Degree Type
Thesis
Department
Chemical and Biomedical Engineering
First Advisor
Gatica, Jorge
Subject Headings
Chemical kinetics, Protective coatings, Calorimetry, DSC, MDSC, COMSOL, Batch Reactor Kinetics, Thin Film Deposition Processes
Abstract
With the recent increase in awareness on the environmental impact of industrial coating processes, chromate-based coating processes have been elevated to the rank of the technologies targeted by the EPA for rapid replacement by environmentally friendly processes. Therefore, there is a clear need for advances in coating technologies to identify alternative industrial practices. This thesis characterizes a process developed at Cleveland State University as an alternative deposition technique to generate uniform coatings onto solid substrates. A kinetic analysis to extract scale up parameters involved in the reaction kinetics leading to high-performance coatings is demonstrated in this research. The work consists of thermal characterization of deposition experiments using Modulated Differential Scanning Calorimeter (MDSC), complemented with preliminary finite-element-modeling (FEM) of fluid flow and transport phenomena in the vicinity of the deposition assembly. MDSC is capable of using linear and modulated heating rates. Modulation over imposes a sinusoidal heating profile to a linear heating rate. Therefore, modulation combines two conventional DSC experiments into one. Modulation provides the ability to differentiate reversibility from irreversibility in transitions. This study intends to study both the advantages and disadvantages of the modulation compared to conventional DSC in the analysis of thin film deposition. A protocol to analyze deposition reaction kinetics using a conventional DSC was formulated in this research. While modulation was unable to produce results that could be compared to the conventional DSC, further in-depth studies need to be completed. This research outlines the experimental procedure to analyze deposition reactions via conventional DSC, and a kinetic analysis procedure to extract reaction kinetics is demonstrated. This research successfully demonstrated that the deposition mechanism can be characterized via DSC experiments. Further studies are anticipated to lead to scale-up criteri
Recommended Citation
Snell, Andrew John roger, "Application of Differential Scanning Calorimetry to Characterize Thin Film Deposition Processes" (2010). ETD Archive. 436.
https://engagedscholarship.csuohio.edu/etdarchive/436